KaPaTek

Leading in Thin Film Thickness measurement technology

Fast Analasys

of transparent and semitransparent layers on substrate, layer thickness range: <10nm up to 250µm

Determination

of the layer thickness and its optical properties n & k , EMA moddeling etc.

Simulation

and measurement of multilayer stacks, up to 10 layers simultneuosly.

KaPatek is a manufacturer of optical Thin Film Measurement Systems based on the measuring principle of spectroscopic reflectometry.
For more than 25 years we have been dealing with optical thin film thickness measurement systems for measuring optical properties and the thickness of transparent and semitransparent layers and offer our customers complete solutions for quality control in R&D and in production. The spectroscopic reflectometry thin film measurement system is a very fast, non-destructive and highly precise measuring method, suitable for ex and in-situ applications.
With our NanoCalc reflectometr measuring systems we meet all these criteria and offer our customers easy-to-use, highly accurate and very affordable measuring tools for metrology applications.

NanoCalc Products

NanoCalc VIS Setup

NanoCalc VIS Setup

USB2000+ VIS Spektrometer, NanoCalc 5.0 Software, HL-2000-FHSA Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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NanoCalc XR Setup

NanoCalc XR Setup

USB2000+ XR Spektrometer, NanoCalc 5.0 Software, DH-2000-BAL Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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NanoCalc NIR Setup

NanoCalc NIR Setup

NIR-Quest Spektrometer, NanoCalc 5.0 Software, HL-2000-FHSA Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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NanoCalc DUV Setup

NanoCalc DUV Setup

Maya-Pro Spektrometer, NanoCalc 5.0 Software, HL-2000-FHSA Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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NanoCalc KOMBI XR-NIR Setup

NanoCalc KOMBI XR-NIR Setup

STS Spektrometer, NanoCalc 5.0 Software, LED- Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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NanoCalc STS(VIS/UV/NIR) Setup

NanoCalc STS(VIS/UV/NIR) Setup

Doppelspektrometer: USB2000+XR u.NIR-Quest Spektrometer, NanoCalc 5.0 Software, DH-2000-BAL Lichtquelle, Faser, Stativ, Kalibrier Wafer(Step-Wafer)

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FAQs

On PCs with Microsoft Win7, Win10 with 32 bit or 64 bit, but not under Linux or OSX.
The software is delivered via a storage medium or via download.
Primarily the thickness of transparent and semitransparent layers. You can determine the optical thickness(geometrical thickness multiplied by refractive index) if you know the exact refractive index.
NanoCalc can measure up to 10 unknown layers. The condition is that the dispersion of these layers are known.
The NanoCalc full version only works in conjunction with an Ocean Insight spectrometer such as Falme-T, Maya Pro, NIRQuest etc.
With sufficient stability of the lamp intensity, absolute approx. + -1nm, caution: with thick layers, the layer itself generally has a variation in thickness that is much higher.
There are Cauchy models for resists, insulators, etc. For more complex tasks, there is an interface to the external SCOUT software.
In pure fiber operation: 200 µm - 400 µm fiber diameter. The working distance is 2 to 5 mm.
This is possible, so you can minimize the measuring spot down to 10 µm and smaller.
However, you should use lenses with a sufficiently small aperture and magnification so that the conditions of perpendicular and parallel incidence of light are still guaranteed.
Via a USB interface. A spectrometer driver is supplied with the setup and entered in the Windows registry during setup. The setup must be carried out by the PC administrator.
NanoCalc can address up to 2 spectrometers. It makes sense to have two separate spectrometers that complement each other spectrally, e.g. B. a USB Flame-T spectrometer in the VIS range and a NIRQUEST spectrometer for the NIR range. This covers a spectral range from 200 nm to 2500 nm.
NanoCalc has a remote interface that can be controlled from other programming languages (C, C ++, Labview, VB.Net, VBA, VB6).
You can also take online measurements with an additional module. The rate depends on whether the spectra are to be evaluated and saved immediately after the measurement. A few measurements / second (not hundreds) are typical.
NanoCalc can be installed on any Win7 or Win10 computer. But if no corresponding USB spectrometer is connected, then NanoCalc only works in a restricted demo mode.
There are NanoCalc tutorials on the KaPaTek homepage which explain the basic functions of NanoCalc to the user.
You can find the NanoCalc tutorials here.